Purge Meter

TOKYO KEISO

General Feature For : Liquid/Gas 

Compact variable area flowmeter. The purgemeters fit for small to medium flow measurement in all types of process, especially in semi-conductor manufacturing process. Suitable for built-in use of equipment

water

• P : 0.5 mL/min - 30 L/min     
• P-710 : 3 mL/min - 2 L/min   
• CP : 5 mL/min - 10 L/min

Air

• P : 0.15 mL/min - 300 L/min    
• P-710 : 50 mL/min - 20 L/min 
• CP : 10 mL/min - 300 L/min